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Abbreviated Journal Title

J. Vac. Sci. Technol. A-Vac. Surf. Films

Keywords

Zno; Materials Science; Coatings & Films; Physics; Applied

Abstract

Zinc oxide-silicon heterojunctions were fabricated using both n- and p-type silicon. The zinc oxide films were deposited by the magnetron sputtering process at various substrate temperatures to form these devices. The electrical properties of these devices were measured and the work function of the zinc oxide was evaluated from these properties.

Journal Title

Journal of Vacuum Science & Technology a-Vacuum Surfaces and Films

Volume

15

Issue/Number

2

Publication Date

1-1-1997

Document Type

Article

Language

English

First Page

428

Last Page

430

WOS Identifier

WOS:A1997WP12700034

ISSN

0734-2101

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