Influences of heating temperature on mechanical properties of polydimethylsiloxane

    Authors

    M. Liu; J. R. Sun;Q. F. Chen

    Comments

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    Abbreviated Journal Title

    Sens. Actuator A-Phys.

    Keywords

    Polydimethylsiloxane (PDMS); Mechanical properties; Influence of heating; PCR CHIP; FABRICATION; LITHOGRAPHY; GLASS; Engineering, Electrical & Electronic; Instruments & Instrumentation

    Abstract

    Polydimethylsiloxane (PDMS) has been widely used for fabrication of various microsystems. Heating is normally used in the fabrication process including curing and bonding, as well as operations like thermopneumatic actuation of PDMS. We report here the influences of heating temperature on mechanical properties (Young's modulus and ultimate tensile stress) of PDMS. Results have shown that for low temperatures, the mechanical properties are independent of heating time. Higher heating temperatures produce lower mechanical strength. The reduced mechanical strength is attributed to the thermal decomposition which starts at about 200 degrees C and reaches a peak at 310 degrees C. (C) 2009 Elsevier B.V. All rights reserved.

    Journal Title

    Sensors and Actuators a-Physical

    Volume

    151

    Issue/Number

    1

    Publication Date

    1-1-2009

    Document Type

    Article

    Language

    English

    First Page

    42

    Last Page

    45

    WOS Identifier

    WOS:000265325800007

    ISSN

    0924-4247

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