Title

Influences of heating temperature on mechanical properties of polydimethylsiloxane

Authors

Authors

M. Liu; J. R. Sun;Q. F. Chen

Comments

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Abbreviated Journal Title

Sens. Actuator A-Phys.

Keywords

Polydimethylsiloxane (PDMS); Mechanical properties; Influence of heating; PCR CHIP; FABRICATION; LITHOGRAPHY; GLASS; Engineering, Electrical & Electronic; Instruments & Instrumentation

Abstract

Polydimethylsiloxane (PDMS) has been widely used for fabrication of various microsystems. Heating is normally used in the fabrication process including curing and bonding, as well as operations like thermopneumatic actuation of PDMS. We report here the influences of heating temperature on mechanical properties (Young's modulus and ultimate tensile stress) of PDMS. Results have shown that for low temperatures, the mechanical properties are independent of heating time. Higher heating temperatures produce lower mechanical strength. The reduced mechanical strength is attributed to the thermal decomposition which starts at about 200 degrees C and reaches a peak at 310 degrees C. (C) 2009 Elsevier B.V. All rights reserved.

Journal Title

Sensors and Actuators a-Physical

Volume

151

Issue/Number

1

Publication Date

1-1-2009

Document Type

Article

Language

English

First Page

42

Last Page

45

WOS Identifier

WOS:000265325800007

ISSN

0924-4247

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