Title

Chemical vapor deposition of novel carbon materials

Authors

Authors

L. Chow; D. Zhou; A. Hussain; S. Kleckley; K. Zollinger; A. Schulte;H. Wang

Comments

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Abbreviated Journal Title

Thin Solid Films

Keywords

chemical vapor deposition; diamond; carbon; scanning electron microscopy; DIAMOND THIN-FILMS; MICROWAVE PLASMAS; NANOTUBES; MECHANISM; EMISSION; Materials Science, Multidisciplinary; Materials Science, Coatings &; Films; Physics, Applied; Physics, Condensed Matter

Abstract

Nanocrystalline diamond thin films have been prepared using hot filament CVD technique with a mixture of CH4/H-2/Ar as the reactant gas. We demonstrated that the ratio of H-2 to Ar in the reactant gas plays an important role in control of the grain size of diamonds and the growth of the nanocrystalline diamonds. In addition, we have investigated the growth of carbon nanotubes from catalytic CVD using a hydrocarbon as the reactant gas. Furthermore, focused ion beam technique has been developed to control the growth of carbon nanotubes individually. (C) 2000 Elsevier Science S.A. All rights reserved.

Journal Title

Thin Solid Films

Volume

368

Issue/Number

2

Publication Date

1-1-2000

Document Type

Article; Proceedings Paper

Language

English

First Page

193

Last Page

197

WOS Identifier

WOS:000087414100006

ISSN

0040-6090

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