Physics of insulating specimen preparation for non-charging Auger electron spectroscopy

    Authors

    S. Wannaparhun; S. Seal; K. Scammon; V. Desai;Z. Rahman

    Comments

    Authors: contact us about adding a copy of your work at STARS@ucf.edu

    Abbreviated Journal Title

    J. Phys. D-Appl. Phys.

    Keywords

    FOCUSED ION-BEAM; SAMPLE PREPARATION; COMPENSATION; AES; Physics, Applied

    Abstract

    Auger electron spectroscopy (AES) has the capability of providing compositional information with excellent spatial resolution. However, charging is known to be a major obstacle to the characterization of insulating materials. This paper discusses a novel technique using focused ion beam (FIB) for the preparation of thin specimens to overcome charging during AES analysis of insulating materials, A double layer model (DLM) was applied to calculate the 'effective thickness' of a Nextel-720 fibre/alumina ceramic matrix composite (CMC) for successful AES analysis with no charging compared to a relatively thick CMC sample. Similarly, the thickness for 50 industrially important solid oxides was calculated using our predictive method for non-charging AES analysis.

    Journal Title

    Journal of Physics D-Applied Physics

    Volume

    34

    Issue/Number

    23

    Publication Date

    1-1-2001

    Document Type

    Article

    Language

    English

    First Page

    3319

    Last Page

    3326

    WOS Identifier

    WOS:000173009300002

    ISSN

    0022-3727

    Share

    COinS