Integration of microbolometers with infrared microstrip antennas

    Authors

    I. Codreanu;G. D. Boreman

    Comments

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    Abbreviated Journal Title

    Infrared Phys. Technol.

    Keywords

    IR detector; infrared antenna; microstrip dipole; microbolometer; RADIATION; Instruments & Instrumentation; Optics; Physics, Applied

    Abstract

    We report on various integration schemes of infrared microbolometers with microstrip antennas. The first integration design consists of two gold (An) rectangular microstrip patches coupled along the radiating edges by a narrow niobium (Nb) strip. Devices using silicon oxide are compared to devices using amorphous silicon as antenna substrate. An extension of the twin-patch detector design is the microstrip dipole antenna-coupled microbolometer. Two ways of connecting the device to the contact pads via narrow dc leads are presented and compared. The contribution of the dc leads to the detector response is eliminated by directly connecting the dipole to the contact pads. The thermal isolation of the microbolometer from the silicon wafer is improved by incorporating air into the antenna dielectric substrate. This leads to higher detector responsivity and shifts the resonance towards longer antennas. The implementation of a bridge microstrip, dipole antenna structure is also discussed. (C) 2002 Elsevier Science B.V. All rights reserved.

    Journal Title

    Infrared Physics & Technology

    Volume

    43

    Issue/Number

    6

    Publication Date

    1-1-2002

    Document Type

    Article

    Language

    English

    First Page

    335

    Last Page

    344

    WOS Identifier

    WOS:000178674200003

    ISSN

    1350-4495

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