Title
Application of microforging to SiCN MEMS fabrication
Abbreviated Journal Title
Sens. Actuator A-Phys.
Keywords
SiCN; MEMS; microcast; microforge; microform; ceramic; CERAMICS; Engineering, Electrical & Electronic; Instruments & Instrumentation
Abstract
Ceramics and polymers are attractive candidate materials for MEMS applications because of the wide range of properties that can be obtained, and the promise of improved performance as compared to the existing materials set for MEMS. A challenge in the fabrication of ceramic MEMS is prohibiting cracking that can occur during processing. For example, this is significant in the development of a microcasting fabrication technique from a polymer precursor for silicon carbonitride (SiCN) MEMS. In this case, shrinkage mismatch between the SiCN structure and the microfabricated mold during thermal processes leads to significant stresses that can crack the ceramic structure. Here, we propose an approach to overcome this problem that relies on demolding prior to the large shrinkage mismatch thermal processes, which itself is a nontrivial challenge. To this end, we propose and describe a microforging process that facilitates demolding and show representative results for numerous SiCN ceramic microstructures. (C) 2002 Elsevier Science B.V. All rights reserved.
Journal Title
Sensors and Actuators a-Physical
Volume
95
Issue/Number
2-3
Publication Date
1-1-2002
Document Type
Article; Proceedings Paper
Language
English
First Page
143
Last Page
151
WOS Identifier
ISSN
0924-4247
Recommended Citation
"Application of microforging to SiCN MEMS fabrication" (2002). Faculty Bibliography 2000s. 3327.
https://stars.library.ucf.edu/facultybib2000/3327
Comments
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