Title

Additive lithography for fabrication of diffractive optics

Authors

Authors

M. Pitchumani; H. Hockel; W. Mohammed;E. G. Johnson

Comments

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Abbreviated Journal Title

Appl. Optics

Keywords

ELEMENTS; Optics

Abstract

An innovative fabrication technique is introduced that is based on multiple-exposure techniques for micro-optics fabrication. This method utilizes various exposure times and combinations of binary and analog photo masks to sculpture complex photoresist profiles. It also demonstrates the fabrication of analog structures from the multilevel structures thus formed by using resist reflow.

Journal Title

Applied Optics

Volume

41

Issue/Number

29

Publication Date

1-1-2002

Document Type

Article

DOI Link

http://dx.doi.org/10.1364/ao.41.006176

Language

English

First Page

6176

Last Page

6181

WOS Identifier

WOS:000178495200015

ISSN

1559-128X

Recommended Citation

"Additive lithography for fabrication of diffractive optics" (2002). Faculty Bibliography 2000s. 3401.
https://stars.library.ucf.edu/facultybib2000/3401