Title

Angstrom-range optica path-length measurement with a high-speed scanning heterodyne optical interferometer

Authors

Authors

N. A. Riza;M. A. Arain

Abbreviated Journal Title

Appl. Optics

Keywords

CONFOCAL MICROSCOPE; SEPARATION; Optics

Abstract

A highly accurate method of optical path-length measurement is introduced by use of a scanning heterodyne optical interferometer with no moving parts. The instrument has demonstrated the potential to measure optical path length at angstrom resolution over continuous thickness in the micrometer range. This optical path length can be used to calculate the thickness of any material if the refractive index is known or to measure the refractive index of the material if the thickness is known. The instrument uses a single acousto-optic device in an in-line ultra-stable reflective geometry to implement rapid scanning in the microsecond domain for thickness measurements of the test medium. (C) 2003 Optical Society of America.

Journal Title

Applied Optics

Volume

42

Issue/Number

13

Publication Date

1-1-2003

Document Type

Article

Language

English

First Page

2341

Last Page

2345

WOS Identifier

WOS:000182519900014

ISSN

1559-128X

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