Angstrom-range optica path-length measurement with a high-speed scanning heterodyne optical interferometer

    Authors

    N. A. Riza;M. A. Arain

    Abbreviated Journal Title

    Appl. Optics

    Keywords

    CONFOCAL MICROSCOPE; SEPARATION; Optics

    Abstract

    A highly accurate method of optical path-length measurement is introduced by use of a scanning heterodyne optical interferometer with no moving parts. The instrument has demonstrated the potential to measure optical path length at angstrom resolution over continuous thickness in the micrometer range. This optical path length can be used to calculate the thickness of any material if the refractive index is known or to measure the refractive index of the material if the thickness is known. The instrument uses a single acousto-optic device in an in-line ultra-stable reflective geometry to implement rapid scanning in the microsecond domain for thickness measurements of the test medium. (C) 2003 Optical Society of America.

    Journal Title

    Applied Optics

    Volume

    42

    Issue/Number

    13

    Publication Date

    1-1-2003

    Document Type

    Article

    Language

    English

    First Page

    2341

    Last Page

    2345

    WOS Identifier

    WOS:000182519900014

    ISSN

    1559-128X

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