Antenna-coupled microbolometers on a silicon-nitride membrane

    Authors

    F. J. Gonzalez; B. Ilic;G. D. Boreman

    Comments

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    Abbreviated Journal Title

    Microw. Opt. Technol. Lett.

    Keywords

    antenna-coupled detectors; microbolometers; silicon nitride membrane; responsivity; thermal impedance; ARRAY; Engineering, Electrical & Electronic; Optics

    Abstract

    Square-spiral antenna-coupled microbolometers made of gold and chrome are fabricated on a silicon-nitride membrane. The membrane gives mechanical stability and thermal isolation to the detectors so that they can be used as picture elements in commercial infrared-imaging systems. The fabricated devices are measured under room pressure and tinder vacuum, giving D* values of 3 X 10(6) cm root Hz/W and 1.7 X 10(7) cm root Hz/W, respectively. By using vanadium-oxide, values well above 1 X 10(8) cm root Hz/W for D* can be obtained. Variations to the fabrication process that will allow the use of vanadium oxide are suggested. (c) 2005 Wiley Periodicals, Inc.

    Journal Title

    Microwave and Optical Technology Letters

    Volume

    47

    Issue/Number

    6

    Publication Date

    1-1-2005

    Document Type

    Article

    Language

    English

    First Page

    546

    Last Page

    548

    WOS Identifier

    WOS:000233228800013

    ISSN

    0895-2477

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