Title

Antenna-coupled microbolometers on a silicon-nitride membrane

Authors

Authors

F. J. Gonzalez; B. Ilic;G. D. Boreman

Comments

Authors: contact us about adding a copy of your work at STARS@ucf.edu

Abbreviated Journal Title

Microw. Opt. Technol. Lett.

Keywords

antenna-coupled detectors; microbolometers; silicon nitride membrane; responsivity; thermal impedance; ARRAY; Engineering, Electrical & Electronic; Optics

Abstract

Square-spiral antenna-coupled microbolometers made of gold and chrome are fabricated on a silicon-nitride membrane. The membrane gives mechanical stability and thermal isolation to the detectors so that they can be used as picture elements in commercial infrared-imaging systems. The fabricated devices are measured under room pressure and tinder vacuum, giving D* values of 3 X 10(6) cm root Hz/W and 1.7 X 10(7) cm root Hz/W, respectively. By using vanadium-oxide, values well above 1 X 10(8) cm root Hz/W for D* can be obtained. Variations to the fabrication process that will allow the use of vanadium oxide are suggested. (c) 2005 Wiley Periodicals, Inc.

Journal Title

Microwave and Optical Technology Letters

Volume

47

Issue/Number

6

Publication Date

1-1-2005

Document Type

Article

Language

English

First Page

546

Last Page

548

WOS Identifier

WOS:000233228800013

ISSN

0895-2477

Share

COinS