Title

Route to three-dimensional metallized microstructures using cross-linkable epoxide SU-8

Authors

Authors

Y. S. Chen; A. Tal;S. M. Kuebler

Comments

Authors: contact us about adding a copy of your work at STARS@ucf.edu

Abbreviated Journal Title

Chem. Mat.

Keywords

MICROFABRICATION; SILVER; MEMS; PHOTORESIST; FABRICATION; DEPOSITION; RESIST; COPPER; GOLD; Chemistry, Physical; Materials Science, Multidisciplinary

Journal Title

Chemistry of Materials

Volume

19

Issue/Number

16

Publication Date

1-1-2007

Document Type

Article

DOI Link

http://dx.doi.org/10.1021/cm0710812

Language

English

First Page

3858

Last Page

3860

WOS Identifier

WOS:000248439400002

ISSN

0897-4756

Recommended Citation

"Route to three-dimensional metallized microstructures using cross-linkable epoxide SU-8" (2007). Faculty Bibliography 2000s. 6948.
https://stars.library.ucf.edu/facultybib2000/6948