Route to three-dimensional metallized microstructures using cross-linkable epoxide SU-8

    Authors

    Y. S. Chen; A. Tal;S. M. Kuebler

    Comments

    Authors: contact us about adding a copy of your work at STARS@ucf.edu

    Abbreviated Journal Title

    Chem. Mat.

    Keywords

    MICROFABRICATION; SILVER; MEMS; PHOTORESIST; FABRICATION; DEPOSITION; RESIST; COPPER; GOLD; Chemistry, Physical; Materials Science, Multidisciplinary

    Journal Title

    Chemistry of Materials

    Volume

    19

    Issue/Number

    16

    Publication Date

    1-1-2007

    Document Type

    Article

    Language

    English

    First Page

    3858

    Last Page

    3860

    WOS Identifier

    WOS:000248439400002

    ISSN

    0897-4756

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