Focused ion beam milling: A method of site-specific sample extraction for microanalysis of Earth and planetary materials

Authors

    Authors

    P. J. Heaney; E. P. Vicenzi; L. A. Giannuzzi;K. J. T. Livi

    Comments

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    Abbreviated Journal Title

    Am. Miner.

    Keywords

    Geochemistry & Geophysics; Mineralogy

    Abstract

    Argon ion milling is the conventional means by which mineral sections are thinned to electron transparency for transmission electron microscope (TEM) analysis, but this technique exhibits significant shortcomings. In particular. selective thinning and imaging of submicrometer inclusions during sample milling are highly problematic. We have achieved successful results using the focused ion beam (FIB) lift-out technique, which utilizes a 30 kV Ga+ ion beam to extract electron transparent specimens with nanometer scale precision. Using this procedure, we have prepared a number of Earth materials representing a range of structures and compositions for TEM analysis. We believe that FIB milling will create major new opportunities in the field of Earth and planetary materials microanalysis, particularly with respect to ultraprecious mineral and rock samples.

    Journal Title

    American Mineralogist

    Volume

    86

    Issue/Number

    9

    Publication Date

    1-1-2001

    Document Type

    Article

    Language

    English

    First Page

    1094

    Last Page

    1099

    WOS Identifier

    WOS:000170969600017

    ISSN

    0003-004X

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