Title

Significance of electrode-spacing in hydrogen detection for tin oxide-based MEMS sensor

Authors

Authors

S. Shukla; P. Zhang; H. J. Cho; L. Ludwig;S. Seal

Comments

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Abbreviated Journal Title

Int. J. Hydrog. Energy

Keywords

hydrogen; MEMS; Nano-Macro integration; Nano-Micro integration; room; temperature; sol-gel; sensor; thin film; GAS-SENSORS; Chemistry, Physical; Electrochemistry; Energy & Fuels

Abstract

"Nano-Macro" and "Nano-Micro" integrated sensor-devices have been fabricated via sol-gel dip-coating the nanocrystalline indium oxide (In2O3)-doped tin oxide (SnO2) thin films on the Pyrex glass and the microelectromechanical system (MEMS) substrates. The electrode-spacing for the "Nano-Macro" integrated sensor-device is maintained at 1 cm while that for the "Nano-Micro" integrated sensor-device is reduced to 10 and 20 mu m. These sensor-devices with different electrode-spacing are characterized using glancing-angle X-ray diffraction (XRD), X-ray photoelectron spectroscope (XPS), and high-resolution transmission electron microscope (HRTEM); and subsequently utilized for sensing 900 ppm hydrogen (H-2) at room temperature under the dynamic test-condition. The "Nano-Macro" and "Nano-Micro" integrated sensor-devices exhibit maximum room temperature H-2 sensitivity of 10(3) and > 10(4) with the response time of 3 h and 250-350 s (for the room temperature H-2 sensitivity of 10(2)), respectively. Moreover, the "Nano-Micro" integrated sensor-device with the smaller electrode-spacing (10 mu m) shows better response kinetics relative to that of the sensor-device with the larger electrode-spacing (20 mu m). The observed sensor-behavior has been explained based on the effect of electrode-spacing on the kinetics of the H-2 sensing mechanism. (C) 2007 International Association for Hydrogen Energy. Published by Elsevier Ltd. All rights reserved.

Journal Title

International Journal of Hydrogen Energy

Volume

33

Issue/Number

1

Publication Date

1-1-2008

Document Type

Article; Proceedings Paper

Language

English

First Page

470

Last Page

475

WOS Identifier

WOS:000253564000067

ISSN

0360-3199

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