Title
Electric-field-driven nano-oxidation trimming of silicon microrings and interferometers
Abbreviated Journal Title
Opt. Lett.
Keywords
PHOTONICS; Optics
Abstract
Nanoscale disorder results in severe spectral misalignment of silicon microring resonators and Mach-Zehnder interferometers. We correct for such effects using electric-field-induced waveguide nano-oxidation, demonstrating a tuning wavelength range of several nanometers and 0.002 nm resolution without line shape degradation. Field-induced nano-oxidation is a permanent and precise technique and requires no new materials or high-temperature processing. (C) 2011 Optical Society of America
Journal Title
Optics Letters
Volume
36
Issue/Number
14
Publication Date
1-1-2011
Document Type
Article
Language
English
First Page
2668
Last Page
2670
WOS Identifier
ISSN
0146-9592
Recommended Citation
"Electric-field-driven nano-oxidation trimming of silicon microrings and interferometers" (2011). Faculty Bibliography 2010s. 1900.
https://stars.library.ucf.edu/facultybib2010/1900
Comments
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