Electric-field-driven nano-oxidation trimming of silicon microrings and interferometers

    Authors

    Y. Shen; I. B. Divliansky; D. N. Basov;S. Mookherjea

    Comments

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    Abbreviated Journal Title

    Opt. Lett.

    Keywords

    PHOTONICS; Optics

    Abstract

    Nanoscale disorder results in severe spectral misalignment of silicon microring resonators and Mach-Zehnder interferometers. We correct for such effects using electric-field-induced waveguide nano-oxidation, demonstrating a tuning wavelength range of several nanometers and 0.002 nm resolution without line shape degradation. Field-induced nano-oxidation is a permanent and precise technique and requires no new materials or high-temperature processing. (C) 2011 Optical Society of America

    Journal Title

    Optics Letters

    Volume

    36

    Issue/Number

    14

    Publication Date

    1-1-2011

    Document Type

    Article

    Language

    English

    First Page

    2668

    Last Page

    2670

    WOS Identifier

    WOS:000293347000023

    ISSN

    0146-9592

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