Authors

J. Chiles; S. Khan; J. Ma;S. Fathpour

Comments

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"This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. This article appeared in the linked citation and may be found originally at Applied Physics Letters."

Abbreviated Journal Title

Appl. Phys. Lett.

Keywords

GUIDES; Physics, Applied

Abstract

Suspended silicon-membrane ridge waveguides are fabricated and characterized on a single-material photonic device platform. By using direct bonding, a thin layer of silicon is fused to a bulk silicon substrate, which is patterned with narrow trenches. Waveguides are etched on the resulting suspended membranes and are characterized at mid-and near-infrared wavelengths. Transverse magnetic-mode propagation losses of 2.8 +/- 0.5 and 5.6 +/- 0.3 dB/cm at 3.39 and 1.53 mu m wavelengths are measured, respectively. This all-silicon optical platform is capable of continuous low-loss waveguiding from wavelengths of 1.2-8.5 mu m, enabling numerous applications in frequency conversion and spectral analysis.

Journal Title

Applied Physics Letters

Volume

103

Issue/Number

15

Publication Date

1-1-2013

Document Type

Article

Language

English

First Page

3

WOS Identifier

WOS:000325779700006

ISSN

0003-6951

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