Printed Sub-100 nm Polymer-Derived Ceramic Structures

    Authors

    B. Duong; P. Gangopadhyay; J. Brent; S. Seraphin; R. O. Loutfy; N. Peyghambarian;J. Thomas

    Comments

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    Abbreviated Journal Title

    ACS Appl. Mater. Interfaces

    Keywords

    nanostructured ceramics; nanoimprinting; sub-100 nm ceramic structures; polymer-derived ceramics; SNAP technique; polyureasilazane; PRECERAMIC POLYMERS; NANOSTRUCTURES; FABRICATION; MICROELECTRONICS; MICROSTRUCTURES; FILMS; MEMS; SICN; Nanoscience & Nanotechnology; Materials Science, Multidisciplinary

    Abstract

    We proposed an unconventional fabrication technique called spin-on nanoprinting (SNAP) to generate and transfer sub-100 nm preceramic polymer patterns onto flexible and rigid substrates. The dimensions of printed nanostructures are almost the same as those of the mold, since the ceramic precursor used is a liquid. The printed patterns can be used as a replica for printing second-generation structures using other polymeric materials or they can be further converted to desirable ceramic structures, which are very attractive for high-temperature and harsh environment applications. SNAP is an inexpensive parallel process and requires no special equipment for operation.

    Journal Title

    Acs Applied Materials & Interfaces

    Volume

    5

    Issue/Number

    9

    Publication Date

    1-1-2013

    Document Type

    Article

    Language

    English

    First Page

    3894

    Last Page

    3899

    WOS Identifier

    WOS:000318839100056

    ISSN

    1944-8244

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