Title

Printed Sub-100 nm Polymer-Derived Ceramic Structures

Authors

Authors

B. Duong; P. Gangopadhyay; J. Brent; S. Seraphin; R. O. Loutfy; N. Peyghambarian;J. Thomas

Comments

Authors: contact us about adding a copy of your work at STARS@ucf.edu

Abbreviated Journal Title

ACS Appl. Mater. Interfaces

Keywords

nanostructured ceramics; nanoimprinting; sub-100 nm ceramic structures; polymer-derived ceramics; SNAP technique; polyureasilazane; PRECERAMIC POLYMERS; NANOSTRUCTURES; FABRICATION; MICROELECTRONICS; MICROSTRUCTURES; FILMS; MEMS; SICN; Nanoscience & Nanotechnology; Materials Science, Multidisciplinary

Abstract

We proposed an unconventional fabrication technique called spin-on nanoprinting (SNAP) to generate and transfer sub-100 nm preceramic polymer patterns onto flexible and rigid substrates. The dimensions of printed nanostructures are almost the same as those of the mold, since the ceramic precursor used is a liquid. The printed patterns can be used as a replica for printing second-generation structures using other polymeric materials or they can be further converted to desirable ceramic structures, which are very attractive for high-temperature and harsh environment applications. SNAP is an inexpensive parallel process and requires no special equipment for operation.

Journal Title

Acs Applied Materials & Interfaces

Volume

5

Issue/Number

9

Publication Date

1-1-2013

Document Type

Article

Language

English

First Page

3894

Last Page

3899

WOS Identifier

WOS:000318839100056

ISSN

1944-8244

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