Title
Large area infrared frequency selective surface with dimensions reproducible by optical lithography
Abbreviated Journal Title
J. Vac. Sci. Technol. B
Keywords
FABRICATION; Engineering, Electrical & Electronic; Nanoscience & Nanotechnology; Physics, Applied
Abstract
An infrared frequency selective surface (FSS) with absorptive resonance near 6.5 mu m was fabricated by electron-beam lithography using a patch design with dimensions reproducible by optical-projection lithography. By selective wet etching along with reactive-ion etching, the sample was divided into miniature FSS particles, which were released from the substrate. A large number of such particles could be implemented as a large area, conformal coating. Spectral reflectivity of the full FSS array as well as the FSS particles was measured and compared to electromagnetic simulations. To show the feasibility of this approach, the full array FSS design was fabricated using a g-line (lambda = 436 nm) 5 x projection lithography stepper and compared to the array fabricated by electron-beam lithography using scanning electron microscopy and Fourier transform infrared spectroscopy. Even though the resolution of the g-line stepper led to a poor fabrication output, the optical resonance was found to be robust, with only slight detuning attributed to the Changes in unit cell geometry. This work highlights the utility of optical-projection lithography, coupled with the releasable particle fabrication procedure, to create a large area, conformal coating with specific infrared spectral properties.
Journal Title
Journal of Vacuum Science & Technology B
Volume
32
Issue/Number
5
Publication Date
1-1-2014
Document Type
Article
DOI Link
Language
English
First Page
5
WOS Identifier
ISSN
1071-1023
Recommended Citation
D' Archangel, Jeffrey A.; Shelton, David J.; Hudgins, Robert; Poutous, Menelaos K.; and Boreman, Glenn D., "Large area infrared frequency selective surface with dimensions reproducible by optical lithography" (2014). Faculty Bibliography 2010s. 5216.
https://stars.library.ucf.edu/facultybib2010/5216
Comments
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