High-responsivity thermoelectric infrared detectors with stand-alone sub-micrometer polysilicon wires

    Authors

    M. J. Modarres-Zadeh;R. Abdolvand

    Comments

    Authors: contact us about adding a copy of your work at [email protected]

    Abbreviated Journal Title

    J. Micromech. Microeng.

    Keywords

    thermoelectric; thermopile; infrared detector; polysilicon; low noise; high responsivity; POLYCRYSTALLINE SILICON FILMS; THERMAL-CONDUCTIVITY; OPTICAL-CONSTANTS; THIN-FILMS; TRANSMITTANCE; PERFORMANCE; REFLECTANCE; FIGURES; MERIT; Engineering, Electrical & Electronic; Nanoscience & Nanotechnology; Instruments & Instrumentation; Materials Science, Multidisciplinary; Mechanics

    Abstract

    A novel high-responsivity uncooled thermoelectric (TE) infrared (IR) detector is designed, fabricated and characterized. This detector features a single stand-alone polysilicon-based thermocouple (without a supporting membrane) covered by an umbrella-like optical cavity IR absorber. It is proved that the highest responsivity in the developed detectors can be achieved with only one thermocouple. Using a single thermocouple also results in a low resistance detector, which consequently limits the Johnson noise (e.g. less than 30 nv/root Hz in this work). Since the sub-micrometer polysilicon TE wires are the only heat path from the hot junction to the substrate, a superior thermal isolation is achieved. A responsivity of 1800 V W-1 and a detectivity of 2* 10(8) (cm Hz(1/2) W-1) are measured from a 20 x 20 mu m detector comparable to the performance of detectors used in commercial focal planar arrays [1]. This performance in a compact and manufacturable design elevates the position of thermoelectric IR sensors as a candidate for low-power, high performance and inexpensive focal planar arrays.

    Journal Title

    Journal of Micromechanics and Microengineering

    Volume

    24

    Issue/Number

    12

    Publication Date

    1-1-2014

    Document Type

    Article

    Language

    English

    First Page

    9

    WOS Identifier

    WOS:000345824400013

    ISSN

    0960-1317

    Share

    COinS
     

    Accessibility Statement

    This item was created or digitized prior to April 24, 2027, or is a reproduction of legacy media created before that date. It is preserved in its original, unmodified state specifically for research, reference, or historical recordkeeping. In accordance with the ADA Title II Final Rule, the University Libraries provides accessible versions of archival materials upon request. To request an accommodation for this item, please submit an accessibility request form.