Effect of acrylic acid additive on electric conductivity of polymer-derived amorphous silicon carbonitride

    Authors

    X. Q. Li; K. W. Wang; B. S. Ma; H. R. Hong; M. Zhang; J. L. Liu; Y. G. Wang;L. N. An

    Comments

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    Abbreviated Journal Title

    Ceram. Int.

    Keywords

    Electric conductivity; Photo-polymerization; Polymer-derived amorphous; SiCN; Acrylic acid; PYROLYSIS TEMPERATURE; SICN MEMS; CERAMICS; PHOTOPOLYMERIZATION; SPECTROSCOPY; FILMS; PIEZORESISTIVITY; FABRICATION; TRANSPORT; SPECTRA; Materials Science, Ceramics

    Abstract

    The effect of acrylic acid additive on the electric conductivity of amorphous SiCN derived from polymeric precursor was studied. The conductivity showed to follow the Arrhenius dependence on pyrolysis temperature, but with much smaller activation energy, as compared to the unmodified SiCN. Structural analysis using Raman and XPS revealed that the size of the free-carbon clusters within the AC-modified SiCN changed with pyrolysis temperature, but the sp(2)-to-sp(3) ratio remained almost the same. The reason for the effect of AC on the carbon cluster was speculated. The mechanisms governing the conductivity behavior of the AC-modified SiCN were discussed. (C) 2015 Elsevier Ltd and Techna Group S.r.l. All rights reserved.

    Journal Title

    Ceramics International

    Volume

    41

    Issue/Number

    6

    Publication Date

    1-1-2015

    Document Type

    Article

    Language

    English

    First Page

    7971

    Last Page

    7976

    WOS Identifier

    WOS:000354140300100

    ISSN

    0272-8842

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