Silicon etching studies using tetramethyl ammonium hydroxide

Keywords

Semiconductors -- Etching; Silicon

Notes

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Graduation Date

2002

Advisor

Sundaram, Kalpathy B.

Degree

Master of Science (M.S.)

College

College of Engineering

Department

Electrical Engineering and Computer Science

Format

Print

Pages

62 p.

Language

English

Length of Campus-only Access

None

Access Status

Masters Thesis (Open Access)

Subjects

Dissertations, Academic -- Engineering; Engineering -- Dissertations, Academic

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