Silicon etching studies using tetramethyl ammonium hydroxide
Keywords
Semiconductors -- Etching; Silicon
Notes
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Graduation Date
2002
Advisor
Sundaram, Kalpathy B.
Degree
Master of Science (M.S.)
College
College of Engineering
Department
Electrical Engineering and Computer Science
Format
Pages
62 p.
Language
English
Length of Campus-only Access
None
Access Status
Masters Thesis (Open Access)
Subjects
Dissertations, Academic -- Engineering; Engineering -- Dissertations, Academic
STARS Citation
Subramanian, Ganesh, "Silicon etching studies using tetramethyl ammonium hydroxide" (2002). Retrospective Theses and Dissertations. 1041.
https://stars.library.ucf.edu/rtd/1041