Design of an inverted microstereolithography systm using uv light

Keywords

Microelectromechanical systems; Microfabrication; Microlithography; Rapid prototyping

Notes

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Graduation Date

Fall 2003

Advisor

Chow, Louis

Degree

Master of Science (M.S.)

College

College of Engineering

Department

Mechanical, Materials, and Aerospace Engineering

Degree Program

Mechanical Engineering

Format

Print

Pages

85 p.

Language

English

Length of Campus-only Access

None

Access Status

Masters Thesis (Open Access)

Subjects

Dissertations, Academic -- Engineering; Engineering -- Dissertations, Academic

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