Three dimensional reconstruction metrology by combinatory multiple parameter characterization and scanning probe microscopy

Keywords

Measurement, Scanning electron microscopy, Scanning probe microscopy

Notes

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Graduation Date

Spring 2001

Advisor

Giannuzzi, Lucille

Degree

Master of Science (M.S.)

College

College of Engineering and Computer Science

Department

Mechanical, Materials, and Aerospace Engineering

Degree Program

Materials Science and Engineering

Format

Print

Language

English

Length of Campus-only Access

None

Access Status

Masters Thesis (Open Access)

Subjects

Dissertations, Academic -- Engineering; Engineering -- Dissertations, Academic

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