Wear characterization of polyurethane chemical mechanical polishing pads

Keywords

Grinding and polishing, Polyurethanes

Notes

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Graduation Date

Summer 2001

Advisor

Richardson, Kathleen

Degree

Master of Science (M.S.)

College

College of Engineering and Computer Science

Department

Mechanical, Materials, and Aerospace Engineering

Format

Print

Language

English

Length of Campus-only Access

None

Access Status

Masters Thesis (Open Access)

Subjects

Dissertations, Academic -- Engineering; Engineering -- Dissertations, Academic

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