Wear characterization of polyurethane chemical mechanical polishing pads
Grinding and polishing, Polyurethanes
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Master of Science (M.S.)
College of Engineering and Computer Science
Mechanical, Materials, and Aerospace Engineering
Length of Campus-only Access
Masters Thesis (Open Access)
Dissertations, Academic -- Engineering; Engineering -- Dissertations, Academic
Machinski, Susan R., "Wear characterization of polyurethane chemical mechanical polishing pads" (2001). Retrospective Theses and Dissertations. 1268.