An electrochemical investigation on Ti/TiN barrier layer CMP

Keywords

Grinding and polishing, Microelectronics -- Materials

Notes

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Graduation Date

Fall 2002

Advisor

Sundaram, Kalpathy

Degree

Master of Science (M.S.)

College

College of Engineering and Computer Science

Department

Electrical Engineering and Computer Science

Format

Print

Language

English

Length of Campus-only Access

None

Access Status

Masters Thesis (Open Access)

Subjects

Dissertations, Academic -- Engineering; Engineering -- Dissertations, Academic

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