An electrochemical investigation on Ti/TiN barrier layer CMP
Grinding and polishing, Microelectronics -- Materials
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Master of Science (M.S.)
College of Engineering and Computer Science
Electrical Engineering and Computer Science
Length of Campus-only Access
Masters Thesis (Open Access)
Dissertations, Academic -- Engineering; Engineering -- Dissertations, Academic
Chathapuram, Venkatraman S., "An electrochemical investigation on Ti/TiN barrier layer CMP" (2002). Retrospective Theses and Dissertations. 1472.