Studies of silicon carbide and silicon carbide nitride thin films

Keywords

Semiconductors, Silicon carbide, Silicon carbide thin films

Notes

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Graduation Date

Summer 2000

Advisor

Sundaram, Kalpathy

Degree

Master of Science (M.S.)

College

College of Engineering

Department

Electrical Engineering and Computer Science

Format

Print

Language

English

Length of Campus-only Access

None

Access Status

Masters Thesis (Open Access)

Subjects

Dissertations, Academic -- Engineering; Engineering -- Dissertations, Academic

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