Electrochemical aspects of metal CMP

Author

Dnyanesh Tamboli, University of Central Florida

Keywords

Electrochemistry, Metals -- Finishing, Semiconductors

Notes

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Graduation Date

Fall 2000

Advisor

Desai, Vimal

Degree

Doctor of Philosophy (Ph.D.)

College

College of Engineering

Department

Mechanical, Materials, and Aerospace Engineering

Format

Print

Language

English

Length of Campus-only Access

None

Access Status

Doctoral Dissertation (Open Access)

Subjects

Dissertations, Academic -- Engineering; Engineering -- Dissertations, Academic

STARS Citation

Tamboli, Dnyanesh, "Electrochemical aspects of metal CMP" (2000). Retrospective Theses and Dissertations. 2001.
https://stars.library.ucf.edu/rtd/2001