Microstructural characterization of titanium nitride and aluminum alloy thin films as a function of variation in processing parameters in silicon based semiconductor devices

Keywords

Metallizing, Microstructure

Notes

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Graduation Date

1999

Semester

Summer

Advisor

Giannuzzi, Lucille A.

Degree

Master of Science (M.S.)

College

College of Engineering

Department

Mechanical, Materials, and Aerospace Engineering

Format

Print

Language

English

Length of Campus-only Access

None

Access Status

Masters Thesis (Open Access)

Subjects

Dissertations, Academic -- Engineering; Engineering -- Dissertations, Academic

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