Microstructural characterization of titanium nitride and aluminum alloy thin films as a function of variation in processing parameters in silicon based semiconductor devices
Keywords
Metallizing, Microstructure
Notes
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Graduation Date
1999
Semester
Summer
Advisor
Giannuzzi, Lucille A.
Degree
Master of Science (M.S.)
College
College of Engineering
Department
Mechanical, Materials, and Aerospace Engineering
Format
Language
English
Length of Campus-only Access
None
Access Status
Masters Thesis (Open Access)
Subjects
Dissertations, Academic -- Engineering; Engineering -- Dissertations, Academic
STARS Citation
Drown MacDonald, Jennifer L., "Microstructural characterization of titanium nitride and aluminum alloy thin films as a function of variation in processing parameters in silicon based semiconductor devices" (1999). Retrospective Theses and Dissertations. 2107.
https://stars.library.ucf.edu/rtd/2107