A study of etch rates of quartz using reactive ion etching

Keywords

Plasma etching, Quartz, Semiconductors -- Etching

Notes

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Graduation Date

1999

Semester

Fall

Advisor

Richie, Samuel M.

Degree

Master of Science (M.S.)

College

College of Engineering

Department

Electrical and Computer Engineering

Format

Print

Language

English

Length of Campus-only Access

None

Access Status

Masters Thesis (Open Access)

Subjects

Dissertations, Academic -- Engineering; Engineering -- Dissertations, Academic

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