A study of etch rates of quartz using reactive ion etching
Plasma etching, Quartz, Semiconductors -- Etching
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Richie, Samuel M.
Master of Science (M.S.)
College of Engineering
Electrical and Computer Engineering
Length of Campus-only Access
Masters Thesis (Open Access)
Dissertations, Academic -- Engineering; Engineering -- Dissertations, Academic
Khan, Masoodur Rahman, "A study of etch rates of quartz using reactive ion etching" (1999). Retrospective Theses and Dissertations. 2167.