Intense capillary discharge plasma extreme-ultraviolet sources for EUV lithography and other EUV imaging applications

Keywords

Optical coatings, Photolithography

Notes

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Graduation Date

1998

Semester

Summer

Advisor

Silfvast, William T.

Degree

Doctor of Philosophy (Ph.D.)

College

College of Engineering

Department

Electrical and Computer Engineering

Degree Program

Optical Science and Engineering

Format

Print

Language

English

Length of Campus-only Access

None

Access Status

Doctoral Dissertation (Open Access)

Subjects

Dissertations, Academic -- Engineering; Engineering -- Dissertations, Academic

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