Keywords
Acoustic surface wave filters
Abstract
Surface Acoustic Wave (SAW) devices are manufactured using standard metallization and photolithographic techniques that have been established by the semiconductor industry. The facilities in the newly developed Microelectronics laboratory at the University of Central Florida will be utilized in the fabrication of a SAW device.
This thesis will outline the complete procedure beginning with the initial design from given specifications, up to mask generation, fabricating and testing of the device. This will serve to calibrate the fabrication process for future work in SAW device and semiconductor fabrication.
The models that are used in the SAWCAD design software will be verified by comparing the theoretical and experimental results.
Notes
If this is your thesis or dissertation, and want to learn how to access it or for more information about readership statistics, contact us at STARS@ucf.edu
Graduation Date
1984
Semester
Fall
Advisor
Malocha, Donald C.
Degree
Master of Science (M.S.)
College
College of Engineering
Degree Program
Engineering
Format
Pages
67 p.
Language
English
Rights
Public Domain
Length of Campus-only Access
None
Access Status
Masters Thesis (Open Access)
Identifier
DP0015927
STARS Citation
Yap, Raymond L., "Surface Acoustic Wave Bidirectional Filter Synthesis and Analysis" (1984). Retrospective Theses and Dissertations. 4705.
https://stars.library.ucf.edu/rtd/4705
Contributor (Linked data)
University of Central Florida. College of Engineering [VIAF]
Accessibility Status
Searchable text