Keywords

Acoustic surface wave filters, Bidirectional SAW filter synthesis, SAWCAD model verification, Interdigital transducer (IDT) design, Photolithography mask generation, Microfabrication process calibration

Abstract

Surface Acoustic Wave (SAW) devices are manufactured using standard metallization and photolithographic techniques that have been established by the semiconductor industry. The facilities in the newly developed Microelectronics laboratory at the University of Central Florida will be utilized in the fabrication of a SAW device.

This thesis will outline the complete procedure beginning with the initial design from given specifications, up to mask generation, fabricating and testing of the device. This will serve to calibrate the fabrication process for future work in SAW device and semiconductor fabrication.

The models that are used in the SAWCAD design software will be verified by comparing the theoretical and experimental results.

Notes

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Graduation Date

1984

Semester

Fall

Advisor

Malocha, Donald C.

Degree

Master of Science (M.S.)

College

College of Engineering

Degree Program

Engineering

Format

PDF

Pages

67 pages

Language

English

Rights

Public Domain

Length of Campus-only Access

None

Access Status

Masters Thesis (Open Access)

Identifier

DP0015927

Subjects

Acoustic surface wave filters; Acoustic surface wave devices--Design and construction; Acoustic surface wave devices--Computer-aided design; Acoustic surface waves--Mathematical models; Acoustic surface waves--Measurement

Accessibility Status

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