Acoustic surface wave filters
Surface Acoustic Wave (SAW) devices are manufactures using standard metallization and photolithographic techniques that have been established by the semiconductor industry. The facilities in the newly developed Microelectronics laboratory at the University of Central Florida will be utilized in the fabrication of a SAW device. This thesis will outline the complete procedure beginning with the initial design from given specifications, up to mask generation, fabricating and testing of the device. This will serve to calibrate the fabrication process for future work in SAW device and semiconductor fabrication. The models that are used in the SAWCAD design software will be verified by comparing the theoretical and experimental results.
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Malocha, Donald C.
Master of Science (M.S.)
College of Engineering
Length of Campus-only Access
Masters Thesis (Open Access)
Yap, Raymond L., "Surface Acoustic Wave Bidirectional Filter Synthesis and Analysis" (1984). Retrospective Theses and Dissertations. 4705.