Title

Design And Fabrication Process For Electrostatic Side-Drive Motors

Abstract

A new process technique has been implemented for the fabrication of electrostatic side-drive micromotors. In the present technique, polyimide has been used as the hub material for fabricating the 4-pole rotor, 8-pole rotor and the wobble micromotors. Process techniques to achieve the micromachining of these structures are discussed in detail. © 1995 IOP Publishing Ltd.

Publication Date

1-1-1995

Publication Title

Journal of Micromechanics and Microengineering

Volume

5

Issue

1

Number of Pages

11-17

Document Type

Article

Personal Identifier

scopus

DOI Link

https://doi.org/10.1088/0960-1317/5/1/003

Socpus ID

0029275591 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/0029275591

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