Title

Effective Channel Length Of Submicron Mosfets: Numerical Simulation, Physical Mechanisms, And Extraction Methods

Abstract

Device simulations are carried out to study the physical mechanisms underlying the effective channel length of MOSFETs. Furthermore, the adequacy of widely used methods for extracting such a parameter is examined using different free-carrier mobility models implemented in the device simulator. Based on the simulation results, a more consistent and accurate definition for determining the effective channel length is also proposed.

Publication Date

12-1-1995

Publication Title

International Conference on Solid-State and Integrated Circuit Technology Proceedings

Number of Pages

292-294

Document Type

Article; Proceedings Paper

Personal Identifier

scopus

Socpus ID

0029459612 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/0029459612

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