Title
Failure of effective-channel length extraction methods due to the effect of the relative doping level of source and drain in short-channel LDD MOSFETs
Abstract
Device simulations with MEDICI are carried out to examine the validity of the widely used methods for extracting the effective channel length in LDD MOSFETs. Our results show that Terada's method fails in LDD MOSFETs when the doping levels are comparable at both sides of each drain-body and source-body junction. Similar failure is also observed in conventional MOSFETs (without LDD) under analogous doping concentration conditions.
Publication Date
12-1-1996
Publication Title
Proceedings of the IEEE Hong Kong Electron Devices Meeting
Number of Pages
91-93
Document Type
Article; Proceedings Paper
Personal Identifier
scopus
Copyright Status
Unknown
Socpus ID
0030411437 (Scopus)
Source API URL
https://api.elsevier.com/content/abstract/scopus_id/0030411437
STARS Citation
Latif, Z.; Ortiz-Conde, A.; and Liou, J. J., "Failure of effective-channel length extraction methods due to the effect of the relative doping level of source and drain in short-channel LDD MOSFETs" (1996). Scopus Export 1990s. 2605.
https://stars.library.ucf.edu/scopus1990/2605