Title

On the extraction of the effective channel length of MOSFETs

Abstract

The validity of the capacitance-based method for extracting the effective channel length of MOSFETs is investigated using results from a two-dimensional device simulator. It is found that the effective channel length obtained from the capacitance-based method is much smaller than those obtained from the current-voltage methods and that discrepancy results from inconsistencies imbedded in the development of the C-V method.

Publication Date

12-1-1997

Publication Title

Proceedings of the International Conference on Microelectronics

Volume

1

Number of Pages

281-284

Document Type

Article; Proceedings Paper

Personal Identifier

scopus

Socpus ID

0031376030 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/0031376030

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