Title

Cryogenic Ice Target For Soft X-Ray Projection Lithography

Abstract

A new concept of a high repetition-rate soft x-ray laser plasma source, introduced for projection lithography, is the mass limited cryogenic target. A mass-limited cryogenic gas target that emits strong line emission as a laser plasma target of a high repetition rate x-ray source for a production line soft x-ray lithography system. This paper describes the design and performance of the cryogenic ice target for soft x-ray projection lithography (SXPL).

Publication Date

1-1-1994

Publication Title

Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting

Volume

8

Number of Pages

177-178

Document Type

Article; Proceedings Paper

Identifier

scopus

Personal Identifier

scopus

Socpus ID

0028079019 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/0028079019

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