Title

Significance Of Electrode-Spacing In Hydrogen Detection For Tin Oxide-Based Mems Sensor

Keywords

Hydrogen; MEMS; Nano-Macro integration; Nano-Micro integration; Room temperature; Sensor; Sol-gel; Thin film

Abstract

"Nano-Macro" and "Nano-Micro" integrated sensor-devices have been fabricated via sol-gel dip-coating the nanocrystalline indium oxide (In2 O3)-doped tin oxide (SnO2) thin films on the Pyrex glass and the microelectromechanical system (MEMS) substrates. The electrode-spacing for the "Nano-Macro" integrated sensor-device is maintained at 1 cm while that for the "Nano-Micro" integrated sensor-device is reduced to 10 and 20 μ m. These sensor-devices with different electrode-spacing are characterized using glancing-angle X-ray diffraction (XRD), X-ray photoelectron spectroscope (XPS), and high-resolution transmission electron microscope (HRTEM); and subsequently utilized for sensing 900 ppm hydrogen (H2) at room temperature under the dynamic test-condition. The "Nano-Macro" and "Nano-Micro" integrated sensor-devices exhibit maximum room temperature H2 sensitivity of 103 and > 104 with the response time of 3 h and 250-350 s (for the room temperature H2 sensitivity of 102), respectively. Moreover, the "Nano-Micro" integrated sensor-device with the smaller electrode-spacing (10 μ m) shows better response kinetics relative to that of the sensor-device with the larger electrode-spacing (20 μ m). The observed sensor-behavior has been explained based on the effect of electrode-spacing on the kinetics of the H2 sensing mechanism. © 2007 International Association for Hydrogen Energy.

Publication Date

1-1-2008

Publication Title

International Journal of Hydrogen Energy

Volume

33

Issue

1

Number of Pages

470-475

Document Type

Article

Personal Identifier

scopus

DOI Link

https://doi.org/10.1016/j.ijhydene.2007.07.043

Socpus ID

38349137778 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/38349137778

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