Title

Characterization Of High-Temperature Ceramic Materials At Microwave Frequencies For Mems Applications

Keywords

Ceramic; Dielectric constant; High temperature; Loss tangent; Waveguide cavity

Abstract

In this paper, the dielectric constant and loss tangent of two new high-temperature ceramic materials, SiCN and AIP04, are characterized using a novel measurement technique at microwave frequencies with high accuracy. These ceramic materials exhibit high thermal stabilities and corrosion resistance, enabling their use for high-temperature sensing applications. The dielectric properties of these ceramic materials are critical parameters in order to develop high-tern perature sensors for turbine engines. It is found that the dielectric constant and loss tangent of SiCN are 4.358 and 5.26 × 10 -3, respectively. For AlPO4, the two parameters are 2.637 and 4.23 × 10-3, respectively. The standard deviation is less than 0.58% for the dielectric constant measurement and less than 5.72% for the loss tangent measurement, demonstrating excellent measurement repeatability. ©2009 IEEE.

Publication Date

11-18-2009

Publication Title

2009 IEEE 10th Annual Wireless and Microwave Technology Conference, WAMICON 2009

Number of Pages

-

Document Type

Article; Proceedings Paper

Personal Identifier

scopus

DOI Link

https://doi.org/10.1109/WAMICON.2009.5207277

Socpus ID

70449393541 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/70449393541

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