Title

A 〈1 0 0〉 Direction Front-Etched Membrane Structure For A Micro-Bolometer

Abstract

In this work, a CMOS-compatible membrane-supported micro-bolometer with a front-etched design along the 〈1 1 0〉 direction is fabricated. The openings in the absorbing area make etching faster on (1 0 0) planes and form a perfect suspending structure. The experiment shows that the design of 〈1 0 0〉-oriented windows in an IR absorbing area together with a thermal sensitive thin film results in short releasing time and good IR absorption. The typical measured responsivity and detectivity of such a bolometer are 8.685 × 103 V W-1 and 2.451 × 108 cm Hz1/2 W-1, respectively. The easy and fast fabrication design makes this structure very suitable for low cost, high performance applications. © 2009 IOP Publishing Ltd.

Publication Date

3-16-2009

Publication Title

Journal of Micromechanics and Microengineering

Volume

19

Issue

3

Number of Pages

-

Document Type

Article

Personal Identifier

scopus

DOI Link

https://doi.org/10.1088/0960-1317/19/3/035022

Socpus ID

61849084768 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/61849084768

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