Title

Laser-Metallized Silicon Carbide Schottky Diodes For Millimeter Wave Detection And Frequency Mixing

Abstract

Laser direct write is a unique process to alter the electrical properties of many semiconductor materials. It is particularly useful for processing wide bandgap materials because it allows metallization without adding any metal to the substrate to fabricate both Ohmic and Schottky contacts. The metallization occurs inside the substrate which offers the prospect of vialess interconnects. It also enables both n-type and p-type doping in such materials. Such techniques can be used to produce electronic devices monolithically. Schottky diodes have been fabricated using the laser direct write technique. Such diodes have been used to make antenna-coupled diodes for millimeter wave detection and imaging. The diodes are also found to operate as frequency mixers at high frequencies (∼92 GHz), which can be used as a tunable device for communication applications. The mixers can also be used to identify chemical species and investigate intermediate species in chemical reactions.

Publication Date

12-1-2003

Publication Title

Proceedings - Electrochemical Society

Volume

11

Number of Pages

270-281

Document Type

Article; Proceedings Paper

Personal Identifier

scopus

Socpus ID

5744245575 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/5744245575

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