Title

Micro-Mechanical Electrostatically Actuated Optic Switch For N × N Cross-Connect Array

Abstract

Planar waveguide SiON technology was used to develop an electrostatically driven micro-optomechanical switch. The performance of the switch was tested using a continous wave (CW) semiconductor laser. The device switch time was measured for driving voltages of 25 V. The switch time did not exceed 100 microseconds. The strutcure of the switch also allowed for scalability in optic fiber networks.

Publication Date

10-8-2001

Publication Title

Conference on Lasers and Electro-Optics Europe - Technical Digest

Number of Pages

153-154

Document Type

Article; Proceedings Paper

Personal Identifier

scopus

Socpus ID

0034814507 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/0034814507

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