Title

Electrostatically Actuated 1 × 2 Micro-Mechanical Optic Switch

Abstract

A micro-opto-mechanical 1 × 2 switch has been realised using silicon oxynitride (SiON) planar waveguide technology. The operational principle of the switch is based on the mechanical deflection of a cantilever beam due to electrostatic interaction. The device concept and performance is reported. The switch is monolithically integrated on a silicon substrate and has many potential applications in fibre-optic local area networks.

Publication Date

3-29-2001

Publication Title

Electronics Letters

Volume

37

Issue

7

Number of Pages

451-452

Document Type

Article

Personal Identifier

scopus

DOI Link

https://doi.org/10.1049/el:20010301

Socpus ID

0035967007 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/0035967007

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