Title

Nanofabrication Of Integrated Diffractive Optical Elements

Keywords

Beam shaping; Diffraction grating; Electron beam lithography; Focused-ion beam; Semiconductor laser

Abstract

We report on the design and fabrication of diffractive optical elements on high power broad area semiconductor lasers. Several issues related to the integrated diffractive elements fabrication by electron beam lithography and focused ion beam are discussed. We illustrate the flexibility of electron beam lithography by presenting results for beam focusing, splitting and tapering functions. An additional technique based on focused ion beam milling is presented for fabricating refractive lens elements onto the laser diode.

Publication Date

5-26-2003

Publication Title

Proceedings of SPIE - The International Society for Optical Engineering

Volume

4984

Number of Pages

79-88

Document Type

Article; Proceedings Paper

Personal Identifier

scopus

DOI Link

https://doi.org/10.1117/12.477837

Socpus ID

0038734183 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/0038734183

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