Title

Robust Microvalves For Hydraulic Actuators

Keywords

Hydraulic Actuators; Large Flow Rate; Robust Microvalves

Abstract

Robust compact hydraulic actuators are extremely needed in space industry where payload is critical. Microvalves are key component for compact hydraulic actuators. Robust microvalves with large load bearing ability, large flow rate, and high operational frequency are objectives of this research. A FEM analytical approach was used to optimize the valve design. The microvalves were fabricated by novel microfabrication process and scaling laws. Electroformed nickel on silicon substrate was used to make the valve flap and deep RIE etching was adopted to make the valve channels while the metallic valve flap as the etching stop. Test results shown that the flow rate is proportional to the pressure applied. The flow rate is larger than 10 cc/sec at pressure or 40 psi. These microvalves can be used to solve engineering problems where both load bearing and flow rate are major concerns.

Publication Date

5-26-2003

Publication Title

Proceedings of SPIE - The International Society for Optical Engineering

Volume

4981

Number of Pages

18-27

Document Type

Article; Proceedings Paper

Personal Identifier

scopus

DOI Link

https://doi.org/10.1117/12.479560

Socpus ID

0038059096 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/0038059096

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