Title

Structural Analysis Of Chalcogenide Waveguides Using Rutherford Backscattering Spectroscopy

Keywords

Chalcogenide glasses; Raman spectroscopy; Rutherford backscattering spectroscopy

Abstract

Chalcogenide glasses are being investigated for waveguide and integrated optical component applications. In order to advance the novel properties exhibited by these glasses, it is crucial to identify the structure/property relationship in both bulk and film materials. Rutherford backscattering spectroscopy was used to obtain compositional, structural, and thickness information on the chalcogenide film structures. Results obtained showed no apparent variation in composition and small density variation in single layer As2S3 films. Multilayer films, in which thicknesses were measured using scanning electron microscope images, displayed compositional and density modifications associated with the annealing process. After a 1 year aging interval, the same analysis was conducted to ascertain changes induced by film aging. Stoichiometric and thickness modifications, caused by aging, were observed in nonannealed structures. No apparent changes were detected in annealed films. Raman spectroscopy was used as a complementary tool to identify the molecular features responsible for these changes. © 2002 Elsevier Science B.V. All rights reserved.

Publication Date

2-3-2003

Publication Title

Thin Solid Films

Volume

425

Issue

1-2

Number of Pages

59-67

Document Type

Article

Personal Identifier

scopus

DOI Link

https://doi.org/10.1016/S0040-6090(02)01139-2

Socpus ID

0037415853 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/0037415853

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