Title
A Room Temperature Hydrogen Sensor With High Sensitivity And Selectivity Using Nanocrystalline Semiconductor Particles
Keywords
Doped Sno 2; H sensor 2; MEMS; Nanoparticles
Abstract
Micro hydrogen sensor with interdigitated electrodes and indium doped nanopolycrystalline SnO2 particles was fabricated and tested. Giant sensitivity as high as 105 with good repeatability and recovery was observed. The sensor showed an excellant selectivity of hydrogen (H2) sensing over helium (He). Copyright © 2005 by ASME.
Publication Date
12-1-2005
Publication Title
American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS
Volume
7 MEMS
Number of Pages
579-582
Document Type
Article; Proceedings Paper
Personal Identifier
scopus
DOI Link
https://doi.org/10.1115/IMECE2005-82357
Copyright Status
Unknown
Socpus ID
33645969885 (Scopus)
Source API URL
https://api.elsevier.com/content/abstract/scopus_id/33645969885
STARS Citation
Zhang, Peng; Shukla, Satyajit; and Ludwig, Larry, "A Room Temperature Hydrogen Sensor With High Sensitivity And Selectivity Using Nanocrystalline Semiconductor Particles" (2005). Scopus Export 2000s. 3345.
https://stars.library.ucf.edu/scopus2000/3345