Title

The Potential Of Electronic High Temperature Devices Based Upon Polymer Derived Ceramics

Abstract

In this paper, we describe the potential use of polymer-derived ceramics (PDCs) for micro-sensors for high-temperature gas turbine applications. PDCs have several unique properties such as ease of microfabrication, excellent mechanical, materials and thermal properties, and tunable electrical conductivity. The electrical conductivity of PDCs with varied composition is measured as a function of temperature from room temperature upon to 700°C. Our results reveal that with suitable doping, the electrical conductivity could be controlled from insulating to semiconducting. Next, we measure the cure depth of the precursors as a function of UV intensity and exposure time. A model is developed to predict the cure depth as a function of photoinitiator concentration and light intensity. Good agreement between theory and experimental data is obtained. Finally, a few typical micro parts are fabricated by lithography technique. Copyright © 2005 by ASME.

Publication Date

11-24-2005

Publication Title

Proceedings of the ASME Turbo Expo

Volume

1

Number of Pages

231-236

Document Type

Article; Proceedings Paper

Personal Identifier

scopus

DOI Link

https://doi.org/10.1115/GT2005-68141

Socpus ID

27744479128 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/27744479128

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