Title

Modeling The Formation Of Photonic Crystals By Holographic Lithography

Keywords

Bandgap; Holographic lithography; Interference lithography; Modeling; Photonic crystals; Simulation

Abstract

An approach is introduced to accurately explore methods of fabricating photonic crystals formed by holographic lithography. Analytical background is given for synthesizing the exposure beam configuration to form the desired lattice. This is combined with a comprehensive model that can predict lattice distortions due to physics of the photolithography process. Simulations are compared to experimental results and to results obtained by conventional intensity threshold methods.

Publication Date

7-21-2005

Publication Title

Progress in Biomedical Optics and Imaging - Proceedings of SPIE

Volume

5720

Number of Pages

18-26

Document Type

Article; Proceedings Paper

Personal Identifier

scopus

DOI Link

https://doi.org/10.1117/12.601186

Socpus ID

21844456630 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/21844456630

This document is currently not available here.

Share

COinS